By Mikhail Baklanov,Paul S. Ho,Ehrenfried Zschech
Advanced Interconnects for ULSI Technology is devoted to the fabrics and strategies that can be compatible replacements. It covers a extensive variety of issues, from actual ideas to layout, fabrication, characterization, and alertness of latest fabrics for nano-interconnects, and discusses:
- Interconnect services, characterisations, electric houses and wiring requirements
- Low-k fabrics: basics, advances and mechanical properties
- Conductive layers and barriers
- Integration and reliability together with mechanical reliability, electromigration and electric breakdown
- New ways together with 3D, optical, instant interchip, and carbon-based interconnects
Intended for postgraduate scholars and researchers, in academia and undefined, this publication offers a severe review of the permitting expertise on the middle of the long run improvement of machine chips.
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Extra info for Advanced Interconnects for ULSI Technology
Advanced Interconnects for ULSI Technology by Mikhail Baklanov,Paul S. Ho,Ehrenfried Zschech